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英语翻译
1.Introduction
A stack-type piezoelectric element,hereafter referred to as a piezo stack,is a multilayer piezo-ceramic column integrated by many thin piezo-ceramic plates which have a parallel electrical connection.The piezo stack is deformed along the longitudinal direction when a voltage is supplied to it,since the piezo-ceramic plate is polarized longitudinally.The piezo stack is a typical actuating source for fine motion generation in the range of several microns,since it has the characteristics of high force,high resolution,fast response and small displacement.Dueto these characteristics,the piezo stack as the actuating source is applicable to stages,scanners for ultra-precision positioning,and precision machining centers [1–13].Compliant mechanisms implemented by flexure hinges are applicable to nano-motion stages.The compliant mechanisms are integrated with piezo stacks for actuating source and high resolution
displacement sensors [7–13].The compliant mechanisms

提问时间:2021-03-27

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